文件名称:Microlithography
介绍说明－－下载内容均来自于网络，请自行研究使用
用于duv光刻掩膜优化算法的模型，包含部分相干光照明，光刻胶分层模型，具体考虑了瞳孔放大系数，以及电磁波的畸变等因素。(The model for DUV photolithography optimization algorithm, including partially coherent light illumination and photoresist stratification model, takes into account the factor of pupil magnification and electromagnetic wave distortion.)
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下载文件列表
| 文件名 | 大小 | 更新时间 |
|---|---|---|
| Microlithography\@Litho\computeImage.m | 7246 | 2015-01-19 |
| Microlithography\@Litho\computePixelMaskSpectrum.m | 183 | 2017-09-07 |
| Microlithography\@Litho\computeSource.m | 1749 | 2017-09-14 |
| Microlithography\@Litho\computeSystem.m | 1000 | 2017-10-27 |
| Microlithography\@Litho\Litho.m | 3174 | 2017-10-27 |
| Microlithography\addPathToKernel.m | 84 | 2016-10-13 |
| Microlithography\ComputeEPE.m | 656 | 2017-05-25 |
| Microlithography\computeHp.m | 1938 | 2017-01-04 |
| Microlithography\computeHpSD.m | 1690 | 2017-08-27 |
| Microlithography\computeHpSD_1.m | 1768 | 2017-06-15 |
| Microlithography\computeJCC.m | 2420 | 2017-06-26 |
| Microlithography\computeVectorM.m | 1598 | 2017-06-15 |
| Microlithography\computeVectorM_1.m | 1663 | 2017-06-15 |
| Microlithography\computeVectorT.m | 681 | 2017-06-15 |
| Microlithography\computeVectorT_1.m | 744 | 2017-09-13 |
| Microlithography\conv2mtx_same.m | 1534 | 2013-08-20 |
| Microlithography\ConvInFreq.m | 474 | 2017-03-31 |
| Microlithography\CSTIC2017PrepImage.m | 460 | 2016-12-14 |
| Microlithography\evolve_normal_ENO2_modified.m | 1582 | 2017-06-14 |
| Microlithography\FindSmallestTwoExpo.m | 103 | 2016-10-21 |
| Microlithography\GetZernikeXYPoly.m | 3260 | 2017-10-27 |
| Microlithography\gssLitho.m | 1675 | 2017-05-19 |
| Microlithography\gssMO.m | 2008 | 2017-06-13 |
| Microlithography\imageEPS.m | 493 | 2017-08-24 |
| Microlithography\images\img11.bmp | 5690 | 2017-11-04 |
| Microlithography\images\img12.bmp | 5690 | 2017-11-04 |
| Microlithography\images\img13.bmp | 5690 | 2017-11-04 |
| Microlithography\images\img14.bmp | 5690 | 2017-11-04 |
| Microlithography\images\img15.bmp | 5690 | 2017-11-04 |
| Microlithography\images\img9.bmp | 5690 | 2017-09-08 |
| Microlithography\images\img9c.bmp | 1678 | 2017-09-08 |
| Microlithography\images\resm11.bmp | 67898 | 2017-11-08 |
| Microlithography\images\resm12.bmp | 67898 | 2017-11-08 |
| Microlithography\images\resm13.bmp | 67898 | 2017-11-08 |
| Microlithography\images\resm14.bmp | 67898 | 2017-11-08 |
| Microlithography\images\resm15.bmp | 67898 | 2017-11-08 |
| Microlithography\images\ress11.bmp | 2006 | 2017-11-08 |
| Microlithography\images\ress12.bmp | 2006 | 2017-11-08 |
| Microlithography\images\ress13.bmp | 2006 | 2017-11-08 |
| Microlithography\images\ress14.bmp | 2006 | 2017-11-08 |
| Microlithography\images\ress15.bmp | 2006 | 2017-11-08 |
| Microlithography\images\resultphoto.m | 1393 | 2017-11-08 |
| Microlithography\ImageVelocity.m | 4468 | 2017-06-02 |
| Microlithography\LithoFconju.m | 4514 | 2017-06-18 |
| Microlithography\main_CalcVectorAerial.m | 2919 | 2016-10-15 |
| Microlithography\maskContour.m | 282 | 2017-05-25 |
| Microlithography\Partially\ImageVelocity.m | 1858 | 2017-09-14 |
| Microlithography\Partially\LithoMOconjuP.m | 4025 | 2017-09-08 |
| Microlithography\Partially\main_Litho.m | 1559 | 2017-09-08 |
| Microlithography\PPPPPpengfei_test1.m | 71 | 2017-09-08 |
| Microlithography\PrepSystem.m | 1808 | 2017-06-24 |
| Microlithography\PrepSystemMO.m | 1615 | 2017-08-27 |
| Microlithography\PrepSystemMOconju.m | 1632 | 2017-06-15 |
| Microlithography\rotate90Hp.m | 788 | 2016-10-23 |
| Microlithography\sigmoid_syj.m | 622 | 2009-03-11 |
| Microlithography\SOcomputeT.m | 918 | 2017-06-26 |
| Microlithography\SOconju.m | 4712 | 2017-06-26 |
| Microlithography\source_ADDA.m | 3236 | 2017-09-15 |
| Microlithography\source_ADG.m | 3625 | 2017-09-17 |
| Microlithography\source_RMS.m | 3061 | 2017-09-14 |
| Microlithography\SOVelocity.m | 662 | 2017-05-18 |
| Microlithography\SOVelocityNW.m | 954 | 2017-05-21 |
| Microlithography\Stratifeid\@Layer\computeM.m | 361 | 2017-09-06 |
| Microlithography\Stratifeid\@Layer\Layer.m | 776 | 2017-09-12 |
| Microlithography\Stratifeid\@stack\computemsp.m | 603 | 2017-09-06 |
| Microlithography\Stratifeid\@stack\computeRT.m | 815 | 2017-09-06 |
| Microlithography\Stratifeid\@stack\multiple.asv | 503 | 2017-09-06 |
| Microlithography\Stratifeid\@stack\stack.m | 684 | 2017-09-06 |
| Microlithography\Stratifeid\computeHp.m | 8470 | 2017-09-14 |
| Microlithography\Stratifeid\ED.asv | 1597 | 2017-10-27 |
| Microlithography\Stratifeid\ED.m | 1613 | 2018-02-14 |
| Microlithography\Stratifeid\ImageVelocity.m | 5055 | 2017-09-14 |
| Microlithography\Stratifeid\iteration_get.m | 1989 | 2017-09-19 |
| Microlithography\Stratifeid\Mask_inverse.m | 4141 | 2017-09-19 |
| Microlithography\Stratifeid\multiple.m | 440 | 2017-09-06 |
| Microlithography\Stratifeid\PrepSystem.m | 1993 | 2018-01-05 |
| Microlithography\test.m | 3429 | 2016-10-17 |
| Microlithography\testConv.m | 463 | 2017-04-25 |
| Microlithography\testLitho.m | 3473 | 2017-08-26 |
| Microlithography\testLithoF.m | 3919 | 2017-08-21 |
| Microlithography\testLithoFconju.m | 3847 | 2017-05-31 |
| Microlithography\testSO.m | 3197 | 2017-05-25 |
| Microlithography\testSOconju.m | 3263 | 2017-06-19 |
| Microlithography\testSOnarrow.m | 3180 | 2017-05-19 |
| Microlithography\testSOnarrowConju.m | 3299 | 2017-06-19 |
| Microlithography\test_ILT.m | 3255 | 2016-10-20 |
| Microlithography\ttest.m | 654 | 2017-04-01 |
| Microlithography\VectorModelGk.m | 1825 | 2017-05-12 |
| Microlithography\VectorModelImage.m | 2935 | 2017-01-04 |
| Microlithography\VectorModelImageSD.m | 1612 | 2016-10-27 |
| Microlithography\VectorModelImageSO.m | 793 | 2017-06-16 |
| Microlithography\VectorModelImageTest.m | 2265 | 2017-03-31 |
| Microlithography\VectorModelVelocity.m | 3277 | 2017-01-04 |
| Microlithography\VectorModelVelocitySD.m | 1553 | 2017-05-25 |
| Microlithography\VectorModelVelocityTest.m | 3430 | 2017-05-24 |
| Microlithography\VnIntermediate.m | 742 | 2016-10-23 |
| Microlithography\Stratifeid\@Layer | 0 | 2018-04-14 |
| Microlithography\Stratifeid\@stack | 0 | 2018-04-14 |
| Microlithography\Stratifeid\data | 0 | 2018-04-14 |
| Microlithography\@Litho | 0 | 2018-04-14 |