文件名称:DEVELOPMENT OF MATHEMATICAL MODEL OF THE MEMS ACCELEROMETER
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- 2021-12-19
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- 471.72kb
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- hrulew_danil@mail.ru
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n this work, the technique for developing mathematical model of the micromechanical (MEMS) accelerometer
MMA7331L of pendular type is presented. Based on the passport data and experimental measurements obtained at room
temperature, a mathematical model of the MEMS accelerometer is developed. The model takes account of accelerometer’s
dynamic and static properties. We carried out the developed model verification by comparing the parameters of real
accelerometer and its model.
MMA7331L of pendular type is presented. Based on the passport data and experimental measurements obtained at room
temperature, a mathematical model of the MEMS accelerometer is developed. The model takes account of accelerometer’s
dynamic and static properties. We carried out the developed model verification by comparing the parameters of real
accelerometer and its model.
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