文件名称:62307628-Analsysis-and-Design-Principles-of-MEMS-
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The MEMS devices such as presuure transducer, micropipes, microactuators, are explained in detail. The structural design and principles are expalined neatly and easily understandable
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62307628-Analsysis-and-Design-Principles-of-MEMS-Devices-by-Min-Hang-Bao-Copy.pdf