文件名称:attachments_2010_04_24
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Chapter 7Metallization
Definition: Processes that deposit metal thin film on wafer surface
Applications
Interconnection
Gate and electrodes
Chapter 9Manufacturing Issues
Nanolithography
RIE
Definition: Processes that deposit metal thin film on wafer surface
Applications
Interconnection
Gate and electrodes
Chapter 9Manufacturing Issues
Nanolithography
RIE
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ch7.ppt
ch9.ppt
ch9.ppt